Effect of beam limiting aperture and collector potential on multi-element focused ion beams

A compact microwave driven plasma based multi-element focused ion beam system has been developed. In the present work, the effect of reduced beam limiter (BL) aperture on the focused ion beam parameters, such as current and spot size, and a method of controlling beam energy independently by introducing a biased collector at focal point (FP) are investigated. It is found that the location of FP does not change due to the reduction of BL aperture. The location of FP and beam size are found to be weakly dependent on the collector potential in the range from -8 kV to -18 kV.