| 高功率紫外激光切割铜薄膜的实验研究 |
| |
| 引用本文： | 阳建华,张帅,陈继民. 高功率紫外激光切割铜薄膜的实验研究[J]. 应用激光, 2005, 25(5): 289-292 |
| |
| 作者姓名： | 阳建华 张帅 陈继民 |
| |
| 作者单位： | 北京工业大学激光工程研究院,北京,100022 |
| |
| 基金项目： | 国家自然科学基金(No.50335050)，北京市教委基金(No.KM200510005013)资助 |
| |
| 摘 要： | 通过改变气氛条件及加工工艺参数,研究高功率紫外激光切割铜薄膜的切割性能及影响因素,并且利用正交实验设计的方法,确定了影响切缝宽度和切割质量的主次因素。在实验的基础上,成功的利用高功率三倍频紫外激光制作出高质量的铜质薄膜器件。
|
| 关 键 词： | 紫外激光 微加工 掩膜 激光切割 |
| 收稿时间： | 2005-08-17 |
| 修稿时间： | 2005-08-17 |
Experimental Research on High Power UV Laser Cutting Cu Membrane |
| |
| Yang Jianhua,Zhang Shuai,Chen Jimin. Experimental Research on High Power UV Laser Cutting Cu Membrane[J]. Applied Laser, 2005, 25(5): 289-292 |
| |
| Authors: | Yang Jianhua Zhang Shuai Chen Jimin |
| |
| Abstract: | A serials of experiments have been carried out on the high power UV Laser cutting Cu Membrane.Through changed the different aid-gases conditions and technological parameters,the width and quality of laser-cutting gaps have been investigated.With an orthogonal array the primary and secondary effect factors on laser cutting Cu Membrane have been confirmed.Based on the results of experiments,some Cu membrane micro-apparatus have been fabricated successfully. |
| |
| Keywords: | UV Laser Micro-fabrication Mask Laser Cutting |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
|
