| 表面波等离子体暴露下铜表面的氧化特性 |
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| 引用本文： | 吉田圭佑,妻鹿义治,川添博光,松野隆,山田刚治,竹内新. 表面波等离子体暴露下铜表面的氧化特性[J]. 材料与冶金学报, 2011, 10(1): 58-60,69 |
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| 作者姓名： | 吉田圭佑 妻鹿义治 川添博光 松野隆 山田刚治 竹内新 |
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| 作者单位： | 日本鸟取大学 |
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| 摘 要： | Surface wave plasma(SWP) is a kind of low temperature plasma which can be utilized for material development.In this research,argon and oxygen were used as a working gas for an SWP experiment and the influence of the plasma irradiation on a copper surface was examined.Particular,relation between the spatial characteristics of SWP and wetting characteristics was examined.As a result,it was found that spatial characteristics of the SWP affected the wetting characteristics and the oxidation characteristics.
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| 关 键 词： | surface wave plasma material surface reformation wetting characteristics |
Study of oxidation characteristic on copper surface exposed by surface wave plasma |
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| Keisuke YOSHIDA,Yoshiharu MEGA,Hiromitu KAWAZOE,Takashi MATSUNO,Gohji YAMADA,Shin TAKEUCHI. Study of oxidation characteristic on copper surface exposed by surface wave plasma[J]. Journal of Materials and Metallurgy, 2011, 10(1): 58-60,69 |
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| Authors: | Keisuke YOSHIDA Yoshiharu MEGA Hiromitu KAWAZOE Takashi MATSUNO Gohji YAMADA Shin TAKEUCHI |
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| Affiliation: | Keisuke YOSHIDA1,Yoshiharu MEGA1,Hiromitu KAWAZOE1, Takashi MATSUNO1,Gohji YAMADA1,Shin TAKEUCHI2 (1.Tottori University,4-101 Minami,Koyama,Tottori,680-8552,Japan; 2.Nissin inc.,10-7 Kamei,Takarazuka,Hyogo,665-0047,Japan) |
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| Abstract: | Surface wave plasma (SWP) is a kind of low temperature plasma which can be utilized for material development. In this research, argon and oxygen were used as a working gas for an SWP experiment and the influence of the plasma irradiation on a copper surface was examined. Particular, relation between the spatial characteristics of SWP and wetting characteristics was examined. As a result, it was found that spatial characteritics of the SWP affected the wetting characteristics and the oxidation characteristics. |
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| Keywords: | surface wave plasma material surface reformation wetting characteristics |
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