| 带缺陷的微型机械结构动力学特性分析 |
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| 引用本文： | 陈真勇,何永勇,褚福磊,黄靖远.带缺陷的微型机械结构动力学特性分析[J].机械工程学报,2004,40(6):23-27. |
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| 作者姓名： | 陈真勇 何永勇 褚福磊 黄靖远 |
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| 作者单位： | 清华大学精密仪器与机械学系,北京,100084 |
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| 基金项目： | 国家自然科学基金(50105007)，教育部“跨世纪优秀人才培养计划”基金 |
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| 摘 要： | 在微机械设备中,由于制造方面的原因,存在诸如结构断裂、结构固定等缺陷,这些缺陷严重影响微机械设备的性能。通过建立微梁单元的三维动力学模型,应用节点分析方法,分别对带有微梁断裂、结构固定的微机械结构进行了动力学特性分析。计算结果表明微梁断裂使微机械结构的刚度降低,从而导致其固有频率变低,而结构固定则相反。
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| 关 键 词： | 微型机械 缺陷 动力学模型 模态分析 |
| 修稿时间： | 2003年4月4日 |
DYNAMIC CHARACTERISTIC ANALYSIS OF THE MICRO-STRUCTURE WITH DEFECTS |
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| Chen Zhenyong,He Yongyong,Chu Fulei,Huang Jingyuan.DYNAMIC CHARACTERISTIC ANALYSIS OF THE MICRO-STRUCTURE WITH DEFECTS[J].Chinese Journal of Mechanical Engineering,2004,40(6):23-27. |
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| Authors: | Chen Zhenyong He Yongyong Chu Fulei Huang Jingyuan |
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| Affiliation: | Chen Zhenyong,He Yongyong,Chu Fulei,Huang Jingyuan Department of Precision Instruments and Mechanicals,Tsinghua University,Beijing 100084 |
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| Abstract: | In micro machine devices, defects such as the broken
structure and unwanted anchors exist freqently for the fabrica-
tion causes. These defects influence the performance of the
micro machine devices greatly.Three-dimension dynamic
model of micro beam is established and nodal analysis method
is used to analyze the dynamic characteristics of the micro ma-
chine structure. The computational results show that the beam
breaking reduces the stiffness of the micro machine structure
and causes the decrease of its modal frequencies.And that the
opposite conclusion is gained for the unwanted anchor. |
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| Keywords: | Micro-machine Defects Dymamic model Modal analysis |
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