薄膜锂电池的研究进展

微电子机械系统(MEMS)和超大规模集成电路(VLSI)技术的发展对能源的微型化、集成化提出了越来越高的要求。全固态薄膜锂电池因其良好的集成兼容性和电化学性能成为MEMS和VLSI能源微型化、集成化的最佳选择。简单介绍了薄膜锂电池的构造,举例说明了薄膜锂电池的工作原理。从阴极膜、固体电解质膜、阳极膜三个方面概述了近年来薄膜锂电池关键材料的研究进展。阴极膜方面LiCoO2依旧是研究的热点,此外对LiNiO2、LiMn2O4、LiNixCo1-xO2、V2O5也有较多的研究;固体电解质膜方面以对LiPON膜的研究为主;阳极膜方面以对锂金属替代物的研究为主,比如锡的氮化物、氧化物以及非晶硅膜,研究多集中在循环效能的提高。在薄膜锂电池结构方面,三维结构将是今后研究的一个重要方向。

Research progress on thin-film lithium batteries

With the development of the MEMS and VLSI, there is an increasing requirement in the miniaturization and integration of power. With better integrated compatibility and electrochemical performance, all-solid-state thin-film lithium battery becomes the optimal choice for miniaturization and integration of MEMS and VLSI power. The structure of thin-film lithium battery was briefly introduced, and the principle of thin-film lithium battery was illustrated. The research progress in key materials of thin-film lithium battery in recent years was summarized in three aspects: cathode film, solid-state electrolyte film and anode film. For cathode film, LiCoO2 is still the research focus. Besides LiCoO2, LiNiO2, LiMn2O4, LiNixCo1-xO2 and V2O5 also attract much attention. For solid-state electrolyte film, the research on LiPON film plays the main role. For anode film, the main attention is paid to the substitutes of lithium metal, such as nitride, oxide of tin metal and amorphous silicon thin-film, in order to gain better cyclic capability. For the structure of thin-film lithium battery, three-dimensional microstructures will be an important research area in the future.