MEMS Resonator‐Based Insulated Voltage Sensor Withstanding Higher Voltage

The Si resonator is applied for measuring the voltage in a highly isolated manner. The working principle is based on the resonant frequency shift caused by the electrical field from the electrode connected to the high‐voltage source (supposing the battery). Here, the resonator is electrically floated, and its potential is decided by the relative position against the electrodes which are connected to the high voltage and the driving voltage. The induced voltage on the resonator is analyzed against the driving frequency. The resonance is found by the paired peaks in the amplitude curve. The setup for the electrical measurement can make the sensor system compact. A new sensor design for avoiding the electrical field concentration realizes the measurement over 400 V without the breakdown. This will match with the high‐voltage dc power supply system.