| 铜的表面改性热处理新方法初探 |
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| 引用本文： | 沈复初,叶必光.铜的表面改性热处理新方法初探[J].浙江大学学报(自然科学版 ),1996,30(5):523-528. |
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| 作者姓名： | 沈复初 叶必光 |
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| 作者单位： | 浙江大学材料系 |
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| 摘 要： | 本文介绍了含硅气氛下纯铜低温ＣＡＤ表面改性的高频感应加热设备，ＣＶＤ装置以及相应的测温装置和手段．进行了纯铜ＣＶＤ表面改性的初步研究．结果表明，在６００℃左右的温度下．利用硅烷－氢（ＳｉＨ４／Ｈ２）混合气在纯铜试样表面的热分解，能够获得铜－硅化合物表层，其硬度较基体有很大的提高．当形成铜硅固溶体时，硬度无明显变化．
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| 关 键 词： | 表面改性，CVD，铜－硅化合物 |
The basic study of a new heat-treatment method for surface property improvement of copper |
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| Shen Fuchu, Ye Biguang, Li Jiang,Mao Zhiyuan, Gan Zhenghao,Jin Shengfa.The basic study of a new heat-treatment method for surface property improvement of copper[J].Journal of Zhejiang University(Engineering Science),1996,30(5):523-528. |
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| Authors: | Shen Fuchu Ye Biguang Li Jiang Mao Zhiyuan Gan Zhenghao Jin Shengfa |
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| Abstract: | A new heat--treatment method for surface property improvement of copper is introduced in this paper. The high frequency induction heating device, and the corresponding device of temperatire measarement are also discribed. The basic study indictates that a coppersilicade intermetallic compound coatintg forms if SiH4 /H2 mixture is used and appropriate technology is selected. It is found that the hardness of the coating is highly improved. |
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| Keywords: | surface property improvement CVD Cu--Si intermetallic compound |
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