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| 溶胶-凝胶法制备Al3+掺杂ZnO薄膜的结构和光学性能 | |
| 引用本文： | 宋立媛,唐利斌,姬荣斌,陈雪梅,刘新近,庄继胜,王茺,杨宇. 溶胶-凝胶法制备Al3+掺杂ZnO薄膜的结构和光学性能[J]. 红外技术, 2011, 33(2): 80-84 |
| 作者姓名： | 宋立媛 唐利斌 姬荣斌 陈雪梅 刘新近 庄继胜 王茺 杨宇 |
| 作者单位： | 1. 云南大学工程技术研究院,光电信息材料研究所,云南,昆明,650091;昆明物理研究所,云南,昆明,650223 2. 昆明物理研究所,云南,昆明,650223 3. 云南大学工程技术研究院,光电信息材料研究所,云南,昆明,650091 |
| 摘 要： | 采用无机盐溶胶-凝胶方法在载玻片衬底上制备了ZnO:Al薄膜,利用X射线衍射(XRD)、紫外-可见光透射光谱(UV-Vis transmittance spectrum)和扫描电镜(SEM)研究了退火温度和Al3+掺杂浓度对ZnO:Al薄膜结构和光学性能的影响.结果表明,随退火温度的升高或进行适当浓度的Al3+掺杂,可... |
| 关 键 词： | ZnO:Al薄膜 紫外-可见光透射光谱(UV-Vis transmittance spectrum) 扫描电镜(SEM) |
Structural and Optical Properties of Aluminum-doped ZnO Thin Films Prepared by Sol-Gel Method |
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| SONG Li-yuan,TANG Li-bin,JI Rong-bin,CHEN Xue-mei,LIU Xin-jin,ZHUANG Ji-sheng,WANG Chong,YANG Yu. Structural and Optical Properties of Aluminum-doped ZnO Thin Films Prepared by Sol-Gel Method[J]. Infrared Technology, 2011, 33(2): 80-84 | |
| Authors: | SONG Li-yuan TANG Li-bin JI Rong-bin CHEN Xue-mei LIU Xin-jin ZHUANG Ji-sheng WANG Chong YANG Yu |
| Affiliation: | SONG Li-yuan1,2,TANG Li-bin2,JI Rong-bin2,CHEN Xue-mei1,LIU Xin-jin2,ZHUANG Ji-sheng2,WANG Chong1,YANG Yu1(1.Institute for Optoelectronic Materials,School of Engine & Technique,Yunnan University,Kunming 650091,2.Kunming Institute of Physics,Kunming 650223,China) |
| Abstract: | ZnO:Al thin films were prepared on the glass substrates by the Sol-Gel method.The effects of different Al3+ dopant concentration and the annealing temperature on the structural and optical properties of ZnO:Al films were studied by using X-ray diffraction(XRD),UV-Vis transmittance spectrum and scanning electron microscope.The results indicated that the ZnO:Al thin films have a preferred c-axis(002) orientation perpendicular to the substrates.With increasing the annealing temperature or adding proper Al3+ do... |
| Keywords: | ZnO:Al thin films Uv-Vis transmittance SEM |
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