Fabrication of membranes and microchannels in low-temperature co-fired ceramic (LTCC) substrate using novel water-based sacrificial carbon pastes |
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| Authors: | Karol Malecha Thomas Maeder Caroline Jacq |
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| Affiliation: | 1. Wroc?aw University of Technology, Faculty of Microsystem Electronics and Photonics, Wybrze?e S. Wyspiańskiego 27, 50-370 Wroc?aw, Poland;2. Ecole Polytechnique Fédérale de Lausanne (EPFL), Laboratoire de Production Microtechnique (LPM), CH-1015 Lausanne, Switzerland;1. Saarland University, Functional Materials, 66123 Saarbrücken, Germany;2. University of Cologne, Inorganic and Materials Chemistry, 50939 Cologne, Germany;3. Saarland University, Physical Chemistry, 66123 Saarbrücken, Germany;1. Institut UTINAM, UMR CNRS 6213, Université de Franche-Comté, 16 route de Gray, Besançon Cedex 25030, France;2. SUEZ environnement – AQUASOURCE, 20 Avenue Didier Daurat, 31029 Toulouse, France;1. VSTU, Lenin Avenue 28, Volgograd 400005, Russia;2. VNIKTInho, Lenin Avenue 98b, Volgograd 400078, Russia;1. Department of Physics, University of Science and Technology of China, Hefei, Anhui 230026, China;2. The Centre for Physical Experiments, University of Science and Technology of China, Hefei, Anhui 230026, China;3. Key Laboratory of Strongly-Coupled Quantum Matter Physics, Chinese Academy of Sciences, School of Physical Sciences, University of Science and Technology of China, Hefei, Anhui 230026, China |
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| Abstract: | In this work, 3D structuration of LTCC (low-temperature co-fired ceramic) for microfluidics was studied, using two novel sacrificial carbon paste compositions. These pastes are based on graphite with a water-soluble vehicle consisting of polyvinylpyrrolidone binder (PVP) dissolved in propylene glycol (PG), which is not aggressive to green LTCC material. Both examined pastes differ slightly in binder content and added plasticizer, glycerol (G) or trimethylolpropane (TMP). The thermal properties of the sacrificial carbon pastes have been examined using combined thermo-gravimetric analysis (TGA), differential thermal analysis (DTA) and differential thermo-gravimetry (DTG). The sacrificial carbon pastes have been applied to the fabrication of membranes and microchannels in LTCC substrate. A comparison of the obtained features has been made using X-ray tomography and optical profile measurements. Moreover, changes in the composition of the fired LTCC material after co-firing have been studied using X-ray photoelectron spectroscopy (XPS) and surface wettability measurements. |
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