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A novel approach to sintering (Ba,Ca)(Ti,Zr)O3 multilayer ceramic capacitors with Ni electrodes
Authors:Shih-Hao Wang  Yin-Lai Chai  Wen-Hsi Lee
Affiliation:1. Department of Electrical Engineering, National Cheng Kung University, Taiwan, ROC;2. Department of Jewelry Technology, The Dahan Institute of Technology, Taiwan, ROC;1. Department of Materials and Mineral Resources Engineering, National Taipei University of Technology, Taipei, Taiwan, ROC;2. Holy Stone Enterprise Co., Ltd., 62, Sec. 2, Huang Shan Rd., Nei Hu Dist., Taipei, Taiwan, ROC;1. Engineering Research Center of Advanced Ferroelectric Functional Materials, College of Chemistry and Chemical Engineering, Baoji University of Arts and Sciences, Key Laboratory of Phytochemistry of Shaanxi Province, Bao ji 721013, China;2. Key Laboratory of Synthetic and Natural Functional Molecule Chemistry, Ministry Education, Shaanxi Key Laboratory of Physico-Inorgani Chemistry, Northwest University, Xi’an 710069, China;1. Electric Conversion Device Center, Korea Electrotechnology Research Institute, 51543 Changwon, South Korea;2. School of Chemical and Material Engineering (SCME), National University of Sciences and Technology (NUST), Isamabad, Pakistan;1. State Key Laboratory of New Ceramics and Fine Processing, School of Materials Science and Engineering, Tsinghua University, Beijing 100084, China;2. School of Materials Science and Physics, China University of Mining and Technology, Xuzhou 221116, China;3. State Key Laboratory of Advanced Materials and Electronic Components, Guangdong Fenghua Advanced Technology Holding Co., Ltd, Zhaoqing, Guangdong 526000, China;1. Dept. of Materials and Mineral Resources Engineering, National Taipei University of Technology, Taipei, Taiwan;2. Holy Stone Enterprise Co. Ltd., Taipei, Taiwan;3. Dept. of Materials Science and Engineering, National Taiwan University, Taipei, Taiwan
Abstract:In this study, a novel sintering technique combining rapid heating and constrained sintering was adopted to fire multilayer ceramic capacitors (MLCCs). It was demonstrated that chamber development can be significantly minimized, leading to a small internal residual stress in MLCCs when they were fired by the novel sintering technique instead of free sintering. The magnitude of tensile stress was closely related to the heating rate and the thickness of the constraining layer. The presence of in-plane tensile stress resulted from the constrained sintering in the xy plane of the MLCCs, which then modified both the densification rate of the dielectric materials and the inner electrode. The thin inner electrode (<1 μm) with high continuity (>98%) and the fine grain size (1.5 μm) with narrow distribution (±0.10 μm) of BCTZ-based MLCC with a concave-free morphology can be attained by using such a rapid constrained sintering technique when BT is used as a constraining layer laminated on both sides of the multilayer BCTZ-based MLCC.
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