Design and performance of a microcantilever-based hydrogen sensor |
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| Affiliation: | 1. Chemical Sensors Division, Graviton Inc., 11025 North Torrey Pines Road, Suite 200, La Jolla, CA 92037, USA;2. Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA;3. Intel Corp., 3101 Jay Street, Suite 110, Santa Clara, CA 95052, USA;1. Univ. Bordeaux, IMS, UMR 5218, F-33400 Talence, France;2. Andra, F-92298 Châtenay-Malabry, France;3. CNRS, LAAS, F-31077 Toulouse, France;4. Department of Civil, Construction and Environmental Engineering, Marquette University, Milwaukee, WI, USA;1. NEST Lab, Department of Physics, Department of Chemistry, College of Sciences, Shanghai University, Shanghai 200444, China;2. Materials Genome Institute, Shanghai University, Shanghai 200444, China;1. Robinson Research Institute, Victoria University of Wellington, Wellington, New Zealand;2. School of Engineering and Computer Science, Victoria University of Wellington, Wellington, New Zealand;1. Wireless and Photonics Network Research Centre, Faculty of Engineering, University Putra Malaysia, 43000 UPM Serdang, Selangor, Malaysia;2. Medical Instrumentations Technical Engineering, Al-Rasheed University College, Baghdad, Iraq;3. Department of Computer Engineering, Federal Polytechnic Mubi, Mubi 650113, Adamawa State, Nigeria;4. Department of Computer Engineering Techniques, Al-Rasheed University College, Baghdad, Iraq;5. Department of Oil and Gas Economics, College of Administrative and Financial Sciences, Imam Ja’afar Al- Sadiq University, Baghdad, Iraq;6. Department of Physical, Faculty of Science, University Putra Malaysia, Serdang 43000, Selangor, Malaysia;7. Department of Electrical, Electronic and System Engineering, Faculty of Engineering and Built Environment, University Kebangsaan Malaysia, Bangi 43600, Selangor, Malaysia;8. Department of Electrical Engineering, College of Engineering, P.O. Box 800, King Saud University, Riyadh 11421, Kingdom of Saudi Arabia;9. Depatment of Computer Techniques Engineering, Dijiah University College, Baghdad, Iraq |
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| Abstract: | This paper describes the design of, and the effects of basic environmental parameters on, a microelectromechanical (MEMS) hydrogen sensor. The sensor contains an array of 10 micromachined cantilever beams. Each cantilever is 500 μm wide×267 μm long×2 μm thick and has a capacitance readout capable of measuring cantilever deflection to within 1 nm. A 20-nm-thick coating of 90% palladium–10% nickel bends some of the cantilevers in the presence of hydrogen. The palladium–nickel coatings are deposited in ultra-high-vacuum (UHV) to ensure freedom from a “relaxation” artifact apparently caused by oxidation of the coatings. The sensor consumes 84 mW of power in continuous operation, and can detect hydrogen concentrations between 0.1 and 100% with a roughly linear response between 10 and 90% hydrogen. The response magnitude decreases with increasing temperature, humidity, and oxygen concentration, and the response time decreases with increasing temperature and hydrogen concentration. The 0–90% response time of an unheated cantilever to 1% hydrogen in air is about 90 s at 25 °C and 0% humidity. |
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