基于干共混法控制柔性模板上金属薄膜微裂纹形貌

以500 nm的SiO₂纳米粒子为填料，聚二甲基硅氧烷(PDMS)为包覆纳米粒子的聚合物，通过一种新颖的干共混法制备了SiO₂纳米粒子含量高达83.8wt%的SiO₂/PDMS柔性模板。所制备柔性模板的弹性模量为16.58 MPa，热膨胀系数为96×10?6/℃，较SiO₂直接掺入PDMS中湿共混制备的纯PDMS柔性模板，弹性模量提高了91.56%，热膨胀系数降低了69.23%，且该柔性模板具有良好的透明度。最后，在柔性模板表面采用磁控溅射法沉积银薄膜，利用SEM和AFM对银薄膜表面形貌进行表征。结果显示，银薄膜表面光滑，粗糙度很小，且具有良好稳定性。干共混法制备的柔性模板有效抑制了金属薄膜微裂纹的产生，为制造导电性良好的电极及大面积的金属薄膜提供了新方案。 

Based on dry blending method to control the micro-cracks morphology of metal film on flexible template

Using 500 nm SiO₂ nanoparticles as a filler and polydimethylsiloxane (PDMS) as a polymer coated with nanoparticles, a novel dry blending method was used to prepare the SiO₂/PDMS flexible template with SiO₂ nanoparticles as high as 83.8wt%. The flexible template has an elastic modulus (E) of 16.58 MPa and a thermal expansion coefficient (CTE) of 96×10?6/°C, compared with the pure PDMS flexible template by direct incorporation of SiO₂ and PDMS in wet blending, which increases by 91.56% and decreases by 69.23%, respectively. The flexible template has good transparency. Finally, a silver film was deposited on the surface of the flexible template by magnetron sputtering, and the surface morphology of the silver film was characterized by SEM and AFM. The results show that the surface of the silver thin film is smooth and the roughness is small, the silver thin film has good stability. Effectively suppression the micro-cracks formation of metal film on the flexible template prepared by the dry blending provides a new solution for the manufacture of good conductivity electrodes and large-area metal film.