基于遗传算法的Low-E膜系中透明介质膜层均匀性在线分析

本文针对离线Low-E镀膜玻璃生产控制过程中对厚度均匀性的需求,提出依据在线测试膜层膜面反射光谱数据,建立柯西光学模型利用遗传算法分析膜层厚度均匀性的方法。采用的在线光谱测量装置安装于镀膜设备产品出口端,在镀膜玻璃宽度方向可以测量24个位置的380~780nm波长范围。研究表明在分析过程利用各点平均光谱由遗传算法分析获得膜层折射率及平均厚度,针对性地建立膜层材料在特定厚度范围内的颜色与厚度关系,在保证分析结果正确性的同时提高了数据分析效率。

On line Analysis of Uniformity of Transparent Dielectric Film in Low-E Film System Based on Genetic Algorithm

In view of the requirement of the thickness uniformity of transparent dielectric film in the Low-E film production control ,Cauchy optical model ,the method and the process of using genetic algorithm to analyze the thickness uniformity ,was proposed according to the reflection spectrum data of the film surface by the on-line test ,.In this paper ,the on-line spectral measuring device was installed on the export side of the coating equipment ,the width of the coated glass can be measured at 24 points ,and the wavelength range of each point is 380～780nm ,the time required for each measuring point is less than 260 ms .The study shows that the refractive index and the average thickness of the film were obtained by using the average spectral analysis based on genetic algorithm . The relationship between the thickness and color of the film can be established .To guarantee the correctness of the analysis results ,the data analysis efficiency is improved .