| 微纳米级表面微观几何形貌和粗糙度特性测量方法 |
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| 引用本文： | 李成贵,熊昌友. 微纳米级表面微观几何形貌和粗糙度特性测量方法[J]. 上海计量测试, 2011, 0(4): 2-8 |
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| 作者姓名： | 李成贵 熊昌友 |
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| 作者单位： | 1. 北京航空航天大学仪器科学与光电工程学院
2. 中航工业北京长城计量测试技术研究所 |
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| 基金项目： | 国家教育部留学回国人员科研启动基金资助项目(201017048) |
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| 摘 要： | 概述微纳米级表面微观几何形貌和粗糙度特性的几种测量方法和测量原理,如触针法、光学法、原子力法等,并介绍市场上在用的几类代表性表面形貌商用仪器(如粗糙度仪、轮廓仪、干涉仪、测量显微镜等)的特点、性能指标及应用范围,对微纳米级表面质量测量和评价有参考价值.
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| 关 键 词： | 微纳米表面 表面粗糙度 微观几何形貌 测量方法 |
The measuring methods overview of micro/nano-surface geometric topography and roughness characteristics |
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| Li Chenggui,Xiong Changyou. The measuring methods overview of micro/nano-surface geometric topography and roughness characteristics[J]. Shanghai Meassurement and Testing, 2011, 0(4): 2-8 |
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| Authors: | Li Chenggui Xiong Changyou |
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| Affiliation: | Li Chenggui1 Xiong Changyou2 (1. Dept. of Meas. and Contr.,Beihang University) (2. Changcheng Institute of Metrology & Measurement) |
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| Abstract: | Several high precision measurement methods and principles of geometric topography and roughness characteristics for micro/nano-surfaces, such as the contact probe method, optical method or atomic force microscopy, are summarized. Furthermore, the characteristics, technical parameters and application domains for some typical commercial instruments are also introduced, e.g. roughmeter, profiler, interferometer, measuring microscope. All of this is useful for the measuring and evaluating of micro/nano-surfaces... |
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| Keywords: | micro/nano-surfaces surface roughness microtopography measuring method |
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