Processes,characterizations, and system applications of color‐filter liquid‐crystal‐on‐silicon microdisplays

Abstract— A color‐filter liquid‐crystal‐on‐silicon (CF‐LCOS) microdisplay that integrates color filters on silicon for color will be presented. The color‐filter process on silicon was optimized to achieve fine resolution and precise alignment of the color filters on the pixel array, good adhesion to the silicon suface, and a flat surface for the liquid‐crystal cell assembly. Important optical and electrical parameters of the color filters were extracted to establish an electro‐optical model of the CF‐LCOS microdisplays for device simulation. Thermal, chemical, and light‐stability characterizations were performed to ensure the stabilty of the color filters and CF‐LCOS microdisplays. With color CF‐LCOS microdisplays already available, the projection or viewing optics is greatly simplified. This CF‐LCOS microdisplay is ideal for near‐to‐eye displays because of its low‐power consumption and compactness. The CF‐LCOS microdisplay could also withstand medium light illumination for medium‐sized projectors. A single‐panel projector based on one CF‐LCOS microdisplay of 1280 × 768 × RGB resolution was demonstrated.