Ion beam, focused ion beam, and plasma discharge machining |
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Authors: | DM Allen C Fanara W O’Brien W O’Neill |
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Affiliation: | a Precision Engineering Centre, Cranfield University, Bedford MK43 0AL, UK b EPPRA, Villebon sur Yvette, 91140, France c Centre for Industrial Photonics, University of Cambridge, Cambridge CB2 1RX, UK |
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Abstract: | Non-conventional methods of machining are used for many engineering applications where the traditional processes fail to be cost-effective. Such processes include Ion Beam Machining (IBM), focused ion beam (FIB) machining and plasma discharge machining. The mechanisms of material removal and associated hardware and software developed for industrial applications of these fascinating electro-physical and chemical machining processes are reviewed together with the latest research findings. |
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Keywords: | Ion Beam Machining Focused Ion Beam Machining Plasma discharge machining |
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