Coplanar Waveguide Using Ferroelectric Thin Oxide Film: Dielectric Constant |
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Authors: | W. J. Kim S. S. Kim T. K. Song S. E. Moon E. K. Kim S. J. Lee S. K. Han M. H. Kwak H. Y. Kim Y. T. Kim H. C. Ryu C. S. Kim K. Y. Hang |
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Affiliation: | (1) Changwon National University, Sarim-Dong 9, Changwon, Korea;(2) Basic Research Laboratory, Electronics and Telecommunications Research Institute, Gajeong-Dong 161, Taejon, Korea |
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Abstract: | Coplanar waveguide (CPW) transmission lines were fabricated on thin ferroelectric Ba1 – xSrxTiO3 films for tunable microwave applications. The growth of the ferroelectric oxide films was accomplished by a pulsed laser deposition with a partial oxygen background. Microwave properties of the CPW phase shifter were measured using a HP 8510C vector network analyzer from 0.045–20 GHz with –40–40 V of dc bias. A large phase shift angle of 120 at 10 GHz was observed from the CPW (gap = 4m, length = 3 mm) with a 40 V of dc bias change. The dielectric constant of the thin ferroelectric film was extracted from the dimension of the CPW (gap, width, length) and the measured S-parameter by a modified conformal mapping. However, the dielectric constant of the ferroelectric thin film exhibits a gap dependency; dielectric constant (990–830) decreases with increasing gap size (4–19 m, respectively). By adjusting the filling factors of the film, a constant dielectric constant of BST film is found to be 810 ± 5. |
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Keywords: | (Ba, Sr)TiO3 thin film ferroelectric conformal mapping phase shifter microwave |
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