| Si/Ge复合纳米结构的制备及表征 |
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| 引用本文： | 秦艳,张晓娜,郑坤,韩晓东,张泽.Si/Ge复合纳米结构的制备及表征[J].电子显微学报,2009,28(5):478-483. |
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| 作者姓名： | 秦艳 张晓娜 郑坤 韩晓东 张泽 |
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| 作者单位： | 北京工业大学,固体微结构与性能研究所,北京,100124 |
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| 基金项目： | 北京市优秀人才微纳米结构中的自组织生长研究 |
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| 摘 要： | 以Si和GeO2为原料,通过简单直接的热蒸发法在衬底的不同温度区域上得到了章鱼状、羽毛球状、拖把状等不同形貌的Si/Ge/O复合纳米结构。利用扫描电镜（SEM）研究了不同衬底区域纳米结构的形态,结合透射电镜（TEM）的明场像和扫描透射（STEM）模式下能谱的面扫描,系统地研究了不同形貌纳米结构的成分分布,并对生长过程进行了探讨。
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| 关 键 词： | 热蒸发法 复合纳米结构 衬底温度 |
Synthesis and characterization of Si/Ge composite nanostructures |
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| QIN Yan,ZHANG Xiao-na,ZHENG Kun,HAN Xiao-dong,ZHANG Ze.Synthesis and characterization of Si/Ge composite nanostructures[J].Journal of Chinese Electron Microscopy Society,2009,28(5):478-483. |
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| Authors: | QIN Yan ZHANG Xiao-na ZHENG Kun HAN Xiao-dong ZHANG Ze |
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| Affiliation: | (Institute of Microstructure and Properties of Advanced Materials, Beijing University of Technology) |
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| Abstract: | By thermal decomposition of Si and GeO_2 powder, different morphologies of Ge- and Si-based nanomaterials have been obtained at different temperature regions of the substrate, including the octopus-like, feather-like and besom-like nanostructures. Scanning electron microscopy (SEM) provided morphologies of these different nanostructures. Combining transmission electron microscopy (TEM) bright-field images and EDS mapping, the elemental distributions and their microstructures of these nanomaterials were investigated. The growing processes of these nanostructures were also discussed. |
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| Keywords: | thermal evaporation composite nanostructures substrate temperature |
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