| 油密封真空泵的安全使用 |
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| 引用本文： | 陈勇,王永忠. 油密封真空泵的安全使用[J]. 电子与封装, 2003, 3(2): 54-56 |
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| 作者姓名： | 陈勇 王永忠 |
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| 作者单位： | 新中亚微电子有限公司,江苏,无锡,214035 |
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| 摘 要： | 本文主要阐述真空机械泵的运行原理,其中着重说明了泵发生安全事故的主要原因,并 提出了如何改善真空系统的建议。
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| 关 键 词： | 油密封 自燃 硅烷 |
| 修稿时间： | 2002-12-24 |
Safety in USE Oil-sealed Vacuum Pump |
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| CHEN Yong,WANG Yong-zhong. Safety in USE Oil-sealed Vacuum Pump[J]. Electronics & Packaging, 2003, 3(2): 54-56 |
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| Authors: | CHEN Yong WANG Yong-zhong |
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| Abstract: | In this paper,a brief introduction to the principle of the running mechanical vacuum pump.The emphasis is placed on the key-reason of the pump accident and how to inprove the structure of the vacuum system. |
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| Keywords: | Oil-seal Self-burning SiH4 |
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