| 纳米晶磁芯螺线管微电感的模拟研究 |
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| 引用本文： | 周庆华,周勇,周志敏,曹莹,丁文.纳米晶磁芯螺线管微电感的模拟研究[J].电子元件与材料,2008,27(9). |
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| 作者姓名： | 周庆华 周勇 周志敏 曹莹 丁文 |
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| 作者单位： | 上海交通大学,微纳科学技术研究院,微米/纳米加工技术国家级重点实验室,薄膜与微细技术教育部重点实验室,上海,200240 |
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| 基金项目： | 国家高技术研究发展计划(863计划)，上海市科委资助项目，国防科技重点实验室基金，基础科研资助项目 |
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| 摘 要： | 为了研制小尺寸、高性能的片上微电感,采用Fe基非晶薄带经退火得到的纳米晶带材作为磁芯材料,并对其高频磁导率进行了测试。对纳米晶磁芯螺线管微电感建立了物理模型,模拟分析了结构参数对微电感性能的影响。结果表明:在1~10MHz频率范围内,所设计的微电感的电感量L在2~12μH,品质因数Q值在1.3~2.3,非常适用于DC-DC变换器等功率电子器件。
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| 关 键 词： | 电子技术 螺线管微电感 非晶/纳米晶带 退火 模拟 |
Simulation study of solenoid microinductor with nanocrystalline magnetic core |
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| ZHOU Qing-hua,ZHOU Yong,ZHOU Zhi-min,CAO Ying,DING Wen.Simulation study of solenoid microinductor with nanocrystalline magnetic core[J].Electronic Components & Materials,2008,27(9). |
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| Authors: | ZHOU Qing-hua ZHOU Yong ZHOU Zhi-min CAO Ying DING Wen |
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| Affiliation: | ZHOU Qing-hua,ZHOU Yong,ZHOU Zhi-min,CAO Ying,DING Wen (National Key Laboratory of Nano/Micro Fabrication Technology,Key Laboratory for Thin Film , Microfabrication of Ministry of Education,Institute of Micro & Nano Science & Technology,Shanghai Jiaotong University,Shanghai 200240) |
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| Abstract: | In order to develop small size and high performance on-chip microinductors, the nanocrystalline material was used for magnetic core. The nanocrystalline material was prepared after Fe-based amorphous ribbon was annealed at different temperatures. And the high frequency permeability was measured. Using the physical model, the influences of structure parameters on microinductor performance were simulated. The results show that the inductance and quality factor of the designed microinductor are between 2~12 μH and 1.3~2.3 in the frequency rang of 1~10 MHz, respectively, which reveals very perspective for power electronic devices such as DC-DC converters. |
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| Keywords: | electron technology solenoid microinductor amorphous/nanocrystalline ribbon anneal simulation |
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