离子注渗复合表面改性技术研究进展

综合国内外研究现状，目前针对离子注渗复合表面改性技术已开展了大量的研究工作，然而还缺少对其进行系统介绍的研究报道。首先，对离子渗技术（离子渗氮、离子渗碳和离子渗硫）、离子注入技术（氮离子注入、碳离子注入和金属离子注入）和离子注渗复合技术的原理进行了介绍。其次，对上述表面改性技术的研究进展进行了综述和总结。最后，针对目前离子注渗复合技术的不足之处，从改善硬件设备、强化作用机理、系统研究复合处理工艺和促进其工业化应用等方面进行解决，提出要充分利用注渗和镀膜技术复合的优势来实现材料结构功能一体化，推动多相复合强化技术的研究与开发，为工业化应用奠定理论基础。

Research Progress of Ion Implantation Composite Surface Modification Technology

The significant issue of material failure is receiving increasing attention as science and technology in our nation continue to advance and grow. Material failure will not only affect the service life of the material, but also cause certain economic losses to the user. Surface modification technology refers to a technology that uses a single or composite technology to improve the physical and chemical properties of the part surface in a direct or indirect way under the premise of ensuring that the chemical composition of the substrate material is basically unchanged or only slightly changed. Therefore, based on the strengthening and toughening mechanism of materials, this paper proposes an ion implanting composite surface modification technology that can improve the comprehensive properties of materials such as mechanics, wear resistance and corrosion resistance. Ion implantation composite surface modification technology can improve surface hardness, wear resistance, corrosion resistance and heat resistance by ion implantation for catalytic infiltration, strengthening infiltration to produce lattice defects and grain refinement. Based on the research status at home and abroad, a lot of research work has been carried out on the ion implantation composite surface modification technology, but there is still a lack of research reports on its systematic introduction in related fields. In this paper, the principles of ion permeation technology (ion nitriding, ion carburizing and ion sulphurizing), ion implantation technology (nitrogen ion implantation, carbon ion implantation and metal ion implantation) and ion implantation/permeation composite technology were introduced firstly. Secondly, the research into the surface characteristics of materials transformed using the aforementioned modification technology was reviewed and summarized. Lastly, a summary of the technology''s drawbacks and prospects for growth was provided. Researchers at home and abroad use the principle of glow discharge to achieve nitriding, carbon, sulfur plasma. For alloy steel, in addition to solid solution strengthening, dispersion hardening also plays a certain role, because the alloy atoms ( Cr, Si, Al, W, Mo, etc.) react with the infiltrated ions to form extremely dispersed compounds, so that the chemical composition and structure of the work piece surface changes, thus achieving high hardness, high wear resistance, fatigue resistance and oxidation resistance. Therefore, ion permeation technology has become an efficient technology in low temperature treatment, and its technology has great development prospects in surface strengthening of important parts in machine tools, light work machinery and power machinery. The ion implantation technology changes the morphology, phase composition, composition and structure of the sample surface and near-surface layer, causing substantial modifications to the material''s mechanical, chemical, and physical properties. Ion implantation technology has obvious effect, high efficiency and strong operability, but there is still a certain gap from the road of industrialization. In order to make ion implantation technology multi-field, multi-functional, multi-form applications, more efforts must be taken for research and development. Ion implantation/permeation composite technology combines the advantages of ion permeation technology and ion implantation technology, and has the characteristics of high injection efficiency, time saving and cost saving. Compared with the single method, ion implantation/permeation composite technology can significantly accelerate the infiltration process and achieve ultrafine microstructure to meet the accuracy and quality requirements of parts. In view of the shortcomings of the current ion implantation composite technology, the problems are solved from the aspects of improving hardware equipment, strengthening mechanism, systematically studying the composite treatment process and promoting its industrial application. It is proposed to make full use of the advantages of implantation/permeation and coating technology to realize the integration of material structure and function, promote the research and development of multiphase composite strengthening technology, and lay a theoretical foundation for industrial application.