非平衡磁控溅镀制备ZrCN-Ti及ZrCN-W镀膜的磨润性能研究

许多年来,氮化钛镀膜的使用相当普遍。在周期表中与钛属于同一周期的另一过渡元素锆,亦是一引人注目的材料。已有许多关于氮化锆的研究,然而,对碳氮化锆的了解仍然有限。本研究使用非平衡磁控溅镀系统制备了ZrCN镀膜,探讨了C2H2/N2反应气体流量比例、以及添加Ti、W等对ZrCN硬度和磨耗性能的影响。结果显示,在总反应气体流量固定不变状态下,ZrCN硬度及磨润性能随反应气体流量比例降低而增加;添加Ti和W会显著增加ZrCN的硬度和磨耗性能,添加Ti的效果比添加W的佳。不论有无添加物,Zr CN的磨耗性能皆明显比TiN的佳。

Tribology Performance of ZrCN-Ti and ZrCN-W Films

For many years, Titanium nitride (TiN) is the most generally used film in every field of applications. Another transition metal Zirconium (Zr), which belongs to the same periodic element group as Ti, is also an attractive material. There have been a lot of research reports with regard to Zirconium nitride (ZrN). However, knowledge on Zirconium carbonitride (ZrCN) is still limited. This paper presents initial experimental results on ZrCN films obtained using an unbalanced magnetron sputtering system. The main purpose of this study is to understand the effects of flow ratio of the reactive gas, nitrogen gas/acetylene (N_2/C_2H_2), and Ti and W additives on the hardness and wear performance of ZrCN series of films. The results showed that the hardness and wear performance of ZrCN films increased with decreasing N_2/C_2H_2 ratio when the amount of reactive gas flow rate was kept constant. The addition of Ti and W led to a significant enhancement in wear performance of ZrCN film, as well as its hardness. The enhancement by Ti additive was greater than that by W additive. ZrCN, with and without Ti/W additives, showed much better wear behavior than TiN.