基于电流变阻尼超精密气浮工作台研究

为解决直线气浮系统抗干扰能力较差等问题，针对已开发的超精密直线气浮工作台，设计了电流变剪切模式阻尼器；基于屈服前后平滑过渡的Eyring连续本构模型通过辨识得出电流变剪切阻尼器类稳态模型；从仿真和实验研究了电流变阻尼及高电场强度对直线气浮工作台模态的影响，实验模态结果验证了仿真方法的有效性，同时证实设计的电流变阻尼器及电场强度的提高不会造成模态频率的下降，只会引起阻尼比的大幅度提高，甚至减少模态阶数。

A Study on Ultra-precision Gas Bearing Stage Equipped with Electrorheological Damper

To overcome the demerits such as the low positioning stability of ultra-precision gas beating stage systems driven by linear motor due to outer disturbances etc. , an electrorheological shear damper was developed and installed on an established ultra-precision gas beating stage system. Through an experimental identification, the electrorheological damper characteristics under various electric fields were obtained based on an Eyring constitutive model, which has a smooth transition from preyield to postyield region. The influences of the electrorheological damper and high electric field intensity on the modal of the ultra-precision gas bearing stage were analyzed by simulation and experiment. The experimental results verify the simulation method, it is shown that developed damping ratios, even reduces the modal numbers. damper decreases the modal frequencies, increases the modal damping ratios, even reduces the modal numbers.