Graphit—ic与Dymon—ic薄膜的结构与性能研究

用全封闭非平衡磁控溅射技术制备Graphit—ic和Dymon—ic薄膜。利用SEM，AFM，TEM，XRD，纳米压痕仪，高温摩擦磨损试验机等研究了薄膜的微观结构、表面形貌、显微硬度以及摩擦磨损性能。结果表明：Graphit—ic薄膜和Dymon—ic薄膜均由非晶组织构成，薄膜均匀、致密，粗糙度小：Graphit—ic薄膜的显微硬度低于Dymon—ic薄膜；同时，在干摩擦条件下，Graphit—ic薄膜和Dymon—ic薄膜与GCr15钢球对磨时显示出良好的耐磨减摩性能，Graphit—ic薄膜的摩擦系数低于Dymon—ic薄膜，但其比磨损率却高于Dymon—ic薄膜。

Structure and Properties of the Graphit-ic and Dymon-ic Coatings

Graphit-ic and Dymon-ic coatings were deposited by closed field unbalanced magnetron ion plating. The microstructure, morphology, microhardness and tribological properties of the coatings were investigated by means of scanning electron microscopy (SEM), atomic force microscopy (AFM), X-ray diffraction (XRD), transmission electron microscopy (TEM), nano-indentation, friction and wear testing. The results show that Graphit-ic and Dymon-ic coatings are dense and smooth. The structure of two coatings is all amorphous. The microhardness of Graphit-ic is lower than Dymon-ic coating. They show a good friction-reducing and a antiwear behavior in sliding against GCr-5 steel. The friction coefficient of Graphit-ic is lower than Dymon-ic, hence, the wear rate of Graphit-ic is higher than Dymon-ic.