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| Electron Transport Behavior in a Mirror Magnetic Field and a Uniform Electric Field | |
| 作者姓名： | 刘艳红 刘祖黎 姚凯伦 |
| 摘 要： | 1.IntroductIOnMuchefforthasbeenpaidontheresearchabouttheglowdischargeofplasma.Low--temperatureandlow-pressuregaseousglowdischargeplasmasarewidelyusedinanumberofapplications,suchasplasmachemicalvapordeposition(PCVD),plasmaetching,plasmadisplay,gaslaser,andplasmasputtering.Someexperimentalresultshaveshownthatinglowdischargeplasmatheelectrontransportbehaviorscanbecontrolledbyamagneticfield.Fukumasaet.al.1]showedthatmagneticfieldcouldbeusedtocontroltheelectrontransportbehaviorsindischargeplasm… |
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