Study on the sintering behavior and characterization of the IGZO ceramics by slip casting |
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| Authors: | Yang Liu Yongchun Shu Xueyun Zeng Benshuang Sun Peng Liang Yu Zhang Chen Qiu Jianhong Yi Jilin He |
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| Affiliation: | 1. TEDA Institute of Applied Physics, Nankai University, Tianjin, China;2. Henan Province Industrial Technology Research Institute of Resources and Materials, Zhengzhou University, Zhengzhou, China;3. Faculty of Materials Science and Engineering, Kunming University of Science and Technology, Kunming, China |
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| Abstract: | High-purity In2O3, Ga2O3 and ZnO (In:Ga:Zn = 1:1:1) mixtures were employed to fabricate the IGZO (In-Ga-Zn-O) ceramics by slip casting. The rheological properties and zeta potential of IGZO slurry were analyzed in details. The optimum amount of dispersant used in the IGZO slurry is studied in details. This study investigated the relationship between the phase composition of sintered IGZO ceramics and sintering temperatures. The IGZO ceramics with high density and low resistivity are successfully synthesized in an air atmosphere, and their grain size is distributed uniformly. |
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| Keywords: | densification density electroceramics green body slip casting |
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