| 基于温控方案的一种MEMS惯性测量装置设计 |
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| 引用本文： | 何海洋,王章波.基于温控方案的一种MEMS惯性测量装置设计[J].计测技术,2014(3):28-31. |
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| 作者姓名： | 何海洋 王章波 |
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| 作者单位： | 中国空空导弹研究院,河南洛阳471009 |
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| 摘 要： | 以提高MEMS惯性测量装置(MIMU)的测量精度为目的,本文设计了一套温度控制系统和控制算法;通过对MIMU进行精密温控,改善了惯性器件的热环境,抑制了外界温度变化对MIMU的干扰,提高了MIMU的综合性能;测试结果验证了方案的有效性。
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| 关 键 词： | MEMS惯性测量装置 温控系统 MEMS陀螺 MEMS加速度计 |
Design of MEMS Inertia Measurement Unit Based on Temperature-controlling Scheme |
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| HE Haiyang,WANG Zhangbo.Design of MEMS Inertia Measurement Unit Based on Temperature-controlling Scheme[J].Metrology & Measurement Technology,2014(3):28-31. |
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| Authors: | HE Haiyang WANG Zhangbo |
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| Affiliation: | ( China Airborne Missile Academy, Luoyang 471009, China) |
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| Abstract: | In order to improve the measurement accuracy of MEMS Inertia Measurement Unit （ MIMU） , a temperature-controlling system is designed. The temperature in MIMU can be controlled accurately, and this is helpful to ameliorate the thermal environment of inertial sensors.The interference of environment temperature variability is decreased, and the performance of MIMU is improved. Finally, the effectiveness of the temperature-controlling scheme is verified. |
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| Keywords: | MEMS Inertia Measurement Unit temperature-controlling system MEMS gyroscope MEMS accelerometer |
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