静电致动圆形微泵膜片的变形计算

针对静电驱动微泵（micropump）多能量域系统仿真中存在计算量大的问题，基于弹性力学小挠度变形理论和微机电系统中的静电驱动理论，建立了静电力驱动下圆形微泵膜片（membrane）的变形曲面方程，采用伽辽金加权残值法得到膜片变形和泵腔容积变化的半解析式，结果显示膜片的变形和泵的容积变化与驱动电压的平方成正比．采用本文公式建立微泵系统宏模型（macromodel）或集中参数模型，有助于提高微泵系统仿真的计算效率．

Deflection of Circular Membrane Actuated Electrostatically in Micropump

To reduce the computation complexity of the multi-physic simulation of the micropump actuated by electrostatic force, the controlling equation of the membrane of micropump was established based on the small deflection theory and electrostatic actuating theory. A half-analytical formula was obtained to calculate the deflection of membrane by utilizing the residual method of Galerkin and the cubage variation of the pump was derived accordingly. The results show that the deflection of the membrane and the cubage variation of the pump are proportional to the square of the voltage. The macromodel or lumped parameter model of the micropump system can be built to improve the computation efficiency in the dynamic simulation process.