| 基于飞秒激光双光子的微齿轮加工技术研究 |
| |
| 引用本文： | 孙树峰,王萍萍,薛伟. 基于飞秒激光双光子的微齿轮加工技术研究[J]. 机械工程学报, 2011, 47(23) |
| |
| 作者姓名： | 孙树峰 王萍萍 薛伟 |
| |
| 作者单位： | 1. 温州大学机电工程学院 温州325035
2. 温州大学国际合作学院 温州325035 |
| |
| 基金项目： | 浙江省自然科学基金(Y1110027); 浙江省科技计划(2009C31016)资助项目 |
| |
| 摘 要： | 针对传统加工方法很难实现微机电系统(Micro electromechanical systems,MEMS)零部件高质量加工的问题,在微细加工技术研究基础上,提出采用飞秒激光双光子聚合加工技术加工标准渐开线微齿轮的方法.采用钛蓝宝石激光器自行搭建的飞秒激光双光子加工系统,能够输出波长为800 nm的飞秒激光用于双光子聚合加工,利用AutoCAD软件设计标准渐开线微齿轮,通过理论和试验两种方法研究激光功率与单个固化点尺寸之间的关系,进而研究扫描步距与加工精度和表面粗糙度之间的关系,结果表明,激光功率越小,加工分辨率越高；扫描步距越小,加工变形越大,但表面质量提高.采用优化后的加工工艺参数加工出高质量的标准渐开线微齿轮,其表面粗糙度Ra27.66 nm.因此,飞秒激光双光子加工技术能够为微齿轮或其他MEMS零部件的加工提供一条有效途径.
|
| 关 键 词： | 双光子 飞秒激光 微齿轮 微细加工 |
Fabrication Technique Research on Micro Gear Based on Two-photon of Femtosecond Laser |
| |
| SUN Shufeng , WANG Pingping , XUE Wei. Fabrication Technique Research on Micro Gear Based on Two-photon of Femtosecond Laser[J]. Chinese Journal of Mechanical Engineering, 2011, 47(23) |
| |
| Authors: | SUN Shufeng WANG Pingping XUE Wei |
| |
| Affiliation: | SUN Shufeng1 WANG Pingping2 XUE Wei1(1.School of Mechanical and Electrical Engineering,Wenzhou University,Wenzhou 325035,2.School of International Cooperation,Wenzhou,325035) |
| |
| Abstract: | Pointing to the problem that it is hard for traditional machining methods to manufacture the parts of micro electromechanical systems(MEMS) with high quality,the method that standard involute micro gear is fabricated by polymerization fabrication technique of two-photon of femtosecond laser is provided based on the research of micro fabrication techniques.Fabrication system of two-photon of femtosecond laser is set up by using Ti-sapphire laser.Femtosecond laser whose wavelength is 800 nm may be output by t... |
| |
| Keywords: | Two-photon Femtosecond laser Micro gear Microfabrication |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
|
