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自旋阀结构薄膜及其自由层的特性研究
引用本文:刘鹏. 自旋阀结构薄膜及其自由层的特性研究[J]. 中国集成电路, 2008, 17(9): 55-57
作者姓名:刘鹏
作者单位:清华大学微电子学研究所,北京,100084
摘    要:基于自旋阀结构的磁传感器因其优良的性能,在传感器家族中具有越来越重要的地位。在自旋阀磁传感器的研制过程中,自旋阀薄膜的制备与性能优化是其中最为重要的一个环节。具有优良特性的自旋阀薄膜是制造高性能自旋阀磁传感器的重要舢出。本文介绍了自旋阀薄膜的特点和性能参数,介绍了自由层对自旋阀性能的影响,并介绍了如何通过改进自由层结构对自旋阀薄膜的性能进行优化。

关 键 词:自旋阀  自由层  磁电阻率  矫顽力

Study on the Characteristic of Spin Valve Film and Its Free Layer
LIU Peng. Study on the Characteristic of Spin Valve Film and Its Free Layer[J]. China Integrated Circuit, 2008, 17(9): 55-57
Authors:LIU Peng
Affiliation:LIU Peng (Institute of Microelectronics, Tsinghua University, Beijing, 100084)
Abstract:Magnetic sensors based on spin valve structure become more and more important in the sensor family because of their good performance. During the research and development of magnetic sensors based on spin valve structure, the most important step is the preparation and optimization of spin valve film. Spin valve magnetic sensors with high performance are based on the spin valve film with high performance. This paper will introduce the characteristic and parameters of spin valve film and introduce the dependency of spin valve on free layer. This paper also introduce the optimization of free layer, which improves the performance of spin valve film.
Keywords:spin valve  free layer  Magnetoresistance Ratio  coercivity
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