激光拉曼光谱在CVD金刚石薄膜质量表征中的应用

激光拉曼光谱是一种优异的，灵敏的，应用广泛的无损表征技术，对于评估碳物质质量及其键合状态，也是有效的手段。

APPLICATIONS OF LASER RAMAN SPECTROSCOPY IN CHARACTERIZING THE QUALITY OF CVD DIAMOND FILMS

Laser Raman spectroscopy is a superior, sensitive and widely-used technique for nondestructive characterization, and is particularly an effective method to evaluate the quality and bonding states of carbon materials. When applied to characterize the quality of CVD diamond films, laser Raman spectroscopy can not only determine whether the film is crystalline or amorphous, but also confirm the existence of diamond, graphte and amorphous carbon structure 'in the film, and sensitively reflect the different bonding states of carbon. By means of line shape fitting analyses using model line shape functions (e. g. the Gaussian, Lorentzian) of Raman spectra, much useful information reflecting the quality of diamond films such as crystallinity, defect density, purity, internal stress etc. can be obtained. The present paper briefly reviews the research results and the present situation in the field.