| W、Mo离子注入对离子镀TiN薄膜表面结构和性能的影响 |
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| 引用本文： | 田斌,刘宝辉,岳文,王成彪. W、Mo离子注入对离子镀TiN薄膜表面结构和性能的影响[J]. 表面技术, 2017, 46(6): 174-179. DOI: 10.16490/j.cnki.issn.1001-3660.2017.06.027 |
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| 作者姓名： | 田斌 刘宝辉 岳文 王成彪 |
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| 作者单位： | 北京工商大学 材料与机械工程学院,北京,100048;中国地质大学(北京) 工程技术学院,北京,100083 |
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| 基金项目： | 国家自然科学基金面上项目（41572362）；北京市教育委员会科技计划一般项目（SQKM201710011002）；中央高校基本科研业务费优秀教师研究项目（2652015077）；高等学校博士学科点专项基金资助课题（20130022110004） |
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| 摘 要： | 目的进一步改善氮化钛薄膜的摩擦学性能。方法利用金属蒸汽真空弧源(MEVVA)在离子镀TiN薄膜表面进行等剂量W、Mo离子注入。采用扫描俄歇系统、光学三维形貌仪、X射线衍射仪和纳米压痕仪,分别分析了TiN薄膜的离子注入深度、表面形貌及粗糙度、相结构和不同压入深度的薄膜硬度。在球盘滑动摩擦磨损试验机上考察了TiN薄膜的摩擦学性能,并利用扫描电子显微镜和三维形貌仪对其磨损形貌进行分析。结果等剂量离子注入后,TiN表面注入层中W离子的含量明显大于Mo离子,两种离子注入对TiN薄膜的表面形貌和硬度的影响较小。XRD结果表明,W离子和Mo离子注入后均发现了Ti_2N硬质相。两种离子注入均可以不同程度地降低TiN薄膜的摩擦系数和磨损率。结论 W、Mo离子注入均可显著改善TiN薄膜的摩擦学性能,但Mo离子更有利于其摩擦系数的降低,而W离子注入更有利于TiN薄膜磨损率的降低。
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| 关 键 词： | 离子注入 氮化钛 摩擦 磨损 钨离子 钼离子 |
| 收稿时间： | 2017-01-15 |
| 修稿时间： | 2017-06-20 |
Effects of W and Mo Ion Implantations on Surface Structures and Properties of Ion-plated Titanium Nitride Coatings |
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| TIAN Bin,LIU Bao-hui,YUE Wen and WANG Cheng-biao. Effects of W and Mo Ion Implantations on Surface Structures and Properties of Ion-plated Titanium Nitride Coatings[J]. Surface Technology, 2017, 46(6): 174-179. DOI: 10.16490/j.cnki.issn.1001-3660.2017.06.027 |
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| Authors: | TIAN Bin LIU Bao-hui YUE Wen WANG Cheng-biao |
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| Affiliation: | School of Material and Mechanical Engineering, Beijing Technology and Business University, Beijing 100048, China,School of Material and Mechanical Engineering, Beijing Technology and Business University, Beijing 100048, China,School of Engineering and Technology, China University of Geosciences (Beijing), Beijing 100083, China and School of Engineering and Technology, China University of Geosciences (Beijing), Beijing 100083, China |
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| Abstract: | The work aims to further improve tribological properties of TiN coatings. W and Mo ion implantations at same doses were performed on ion-plated TiN coatings using metal vapor vacuum arc (MEVVA) source. Ion implantation depth, morphology, surface roughness, phase structure, and nano-hardness at different implantation depth of TiN coatings were analyzed with scanning auger microprobe (SAM), three-dimensional optical profilometer, X-ray diffractometer (XRD) and nano indentor, respectively. Tribological peroperties of TiN coatings were investigated on a ball-on-disk sliding tribometer. Also, wear appearance was analyzed with scanning electron microscopy (SEM) and three-dimensional optical profilometer. Content of W ions in TiN coatings was obviously higher than that of Mo ions after the same dose implantations. W and Mo ion implantations had less effect on surface morphology and hardness of TiN coatings. The XRD results showed that Ti2N phases appeared on TiN coatings after W and Mo ion implantations. The friction coefficient and wear rate of TiN coatings decreased to different extent after W and Mo ion implantations. Tribological properties of the ion-plated TiN coatings cab be improved by both W and Mo implantations. However, the Mo ion implantation is more conducive to reduction of friction coefficient while the W ion implantation is more conducive to redcution of wear rate. |
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| Keywords: | ion implantations titanium nitride friction wear tungsten ions molybdenum ions |
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