| 一种测量全息光栅槽深的新方法 |
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| 引用本文： | 徐森禄
,万春雷.一种测量全息光栅槽深的新方法[J].浙江大学学报(自然科学版 ),1988(6). |
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| 作者姓名： | 徐森禄 万春雷 |
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| 摘 要： | 本文用微分方法分析计算TE波入射时金属全息光栅的电磁场,并应用我们发展的计算程序能够得列全息光栅的不同槽深时之衍射效率曲线。结果表明通过测量某一波长TE波45°入射时的全息光栅零级的衍射效率(反射率)可获得其槽深的信息。实验结果与计算值很好相符。本方法对生产全息光栅时控制工艺过程具有非接触与实时测最的优越性。
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| 关 键 词： | 光学测试 全息光栅 |
A Novel Method for Measuring the Groove Depth of Holographic Grating |
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| Xu Senlu Wan Chunlei.A Novel Method for Measuring the Groove Depth of Holographic Grating[J].Journal of Zhejiang University(Engineering Science),1988(6). |
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| Authors: | Xu Senlu Wan Chunlei |
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| Affiliation: | Xu Senlu Wan Chunlei |
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| Abstract: | In this paper,a differential method for analysing and calculating the electromagnetic field of metallic holographic gratings with TE-mode incidence is described.So that,using the program developped by us,the diffraction efficiency curve of grating with different groove depths could be obtained.eThe results show that the groove depth information can determined by this curve on condition that the incident is 45?with TE-mode and zeso-order diffraction(reflectance)of a certain wavelength.The experimental results and the calculated values are well agreed.It is very intesesting that the method is no-touching and real-time for controling technique producing a holographic grating. |
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| Keywords: | Optical testing Holographic grating |
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