High functionality of a polymer nanocomposite material for MEMS applications |
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Authors: | Fareed Dawan Yoonyoung Jin Jost Goettert Samuel Ibekwe |
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Affiliation: | 1. The Center for Advanced Microstructures and Devices, Louisiana State University and A&M College, 6980 Jefferson HWY, Baton Rouge, LA, 70806, USA 2. The Department of Mechanical Engineering, Southern University and A&M College, 324 Pinchback Hall, Baton Rouge, LA, 70813, USA
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Abstract: | We present on a carbon nanoparticle-filled SU-8 photosensitive polymer nanocomposite for use in microelectromechanical systems (MEMS) or microsystems. Exposure and fabrication of the material was carried out using X-ray lithography. The polymer nanocomposite was studied for its electrical, thermal and mechanical characteristics. It was found that at low filler weight percentages, the SU-8 polymer became electrically and thermally conductive. A comparative study of the lithography performance of this functionalized SU-8 to pure SU-8 was also performed. It was determined that UV lithography of the PNC was not suitable for thick films and that by using X-rays, thick film high-aspect-ratio microstructures were achievable. Such results are favorable for many applications such as monolithically integrated polymeric micro-resistive heating elements and polymeric micro-heat sinks. |
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