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Manufacturing process for high aspect ratio metallic micro parts made by electroplating on partially conductive templates |
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| Authors: | J Prokop G Finnah J Lorenz V Piotter R Ruprecht J Hausselt |
| Affiliation: | 1. Forschungszentrum Karlsruhe, IMF III, Postfach 3640, 76021, Karlsruhe, Germany 2. Robert Bosch GmbH, Postfach 1127, 71301, Waiblingen, Germany |
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