| Effects of Different Titanium Sub-oxide on the Properties of Titanium Dioxide Thin Films Prepared by E-beam Evaporation Deposition with Ion Auxiliary |
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| 引用本文： | GUO Aiyun XUE Yiyu ZHU Xuanmin ZHANG Guangyong GUO Peitao HU Xiaofeng. Effects of Different Titanium Sub-oxide on the Properties of Titanium Dioxide Thin Films Prepared by E-beam Evaporation Deposition with Ion Auxiliary[J]. 武汉理工大学学报(材料科学英文版), 2006, 21(2): 101-104. DOI: 10.1007/BF02840851 |
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| 作者姓名： | GUO Aiyun XUE Yiyu ZHU Xuanmin ZHANG Guangyong GUO Peitao HU Xiaofeng |
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| 作者单位： | School of Materials Science and Engineering, Wuhan University of Technology, Wuhan 430070, China |
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| 摘 要： | TiO2 thin films were prepared with Ti2O3, Ti3O5 and TiO2 as raw materials, by electron-beam evaporation deposition, using O^2- ion beam （ O2 purity up to 99.99% ） as auxiliary means. The crystal structures of the samples were inspected by the X-ray diffraction （XRD） method, and the evaporation character of warious raw materials was analyzed. Transmittance spectra were measured through a U-3310 spectrophotometer （ wavelength ranging from 200 nm to 900 nm）. The refractive index n and the thickness of films were determined from transmission spectra. The experimental results show that the thin films taking Ti2O3 as their raw material have a strong absorption, when taking Ti3O5 and TiO2 as raw materials, the thin films would have good optical properties. The experiments also show that, the crystal structure of all thin films is amorphous before post-annealing and the Ti3O5 is a congruent evaporation phase in the Ti-O system.
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| 关 键 词： | 二氧化钛薄膜 制备 电子束蒸发法 离子辅助淀积 |
| 收稿时间： | 2005-02-12 |
| 修稿时间： | 2005-11-08 |
Effects of different titanium sub-oxide on the properties of titanium dioxide thin films prepared by e-beam evaporation deposition with ion auxiliary |
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| Guo Aiyun,Xue Yiyu,Zhu Xuanmin,Zhang Guangyong,Guo Peitao,Hu Xiaofeng. Effects of different titanium sub-oxide on the properties of titanium dioxide thin films prepared by e-beam evaporation deposition with ion auxiliary[J]. Journal of Wuhan University of Technology. Materials Science Edition, 2006, 21(2): 101-104. DOI: 10.1007/BF02840851 |
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| Authors: | Guo Aiyun Xue Yiyu Zhu Xuanmin Zhang Guangyong Guo Peitao Hu Xiaofeng |
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| Affiliation: | (1) School of Materials Science and Engineering, Wuhan University of Technology, 430070 Wuhan, China |
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| Abstract: | TiO_2 thin films were prepared with Ti_2O_3, Ti_3O_5 and TiO_2 as raw materials, by electron-beam evaporation deposition, using O 2- ion beam (O_2 purity up to 99.99%) as auxiliary means. The crystal structures of the samples were inspected by the X-ray diffraction (XRD) method, and the evaporation character of various raw materials was analyzed. Transmittance spectra were measured through a U-3310 spectrophotometer (wavelength ranging from 200 nm to 900 nm). The refractive index n and the thickness of films were determined from transmission spectra. The experimental results show that the thin films taking Ti_2O_3 as their raw material have a strong absorption, when taking Ti_3O_5 and TiO_2 as raw materials, the thin films would have good optical properties. The experiments also show that, the crystal structure of all thin films is amorphous before post-annealing and the Ti_3O_5 is a congruent evaporation phase in the Ti-O system. |
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| Keywords: | titanium sub-oxide thin film E-beam evaporation IAD |
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