| GCr15轴承钢表面PⅢD处理膜层膜基结合力的研究 |
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| 引用本文： | 王宇航,汤宝寅,王浪平,王晓峰,甘孔银,于永澔,刘洪喜,王松雁.GCr15轴承钢表面PⅢD处理膜层膜基结合力的研究[J].真空科学与技术学报,2004,24(3):233-237. |
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| 作者姓名： | 王宇航 汤宝寅 王浪平 王晓峰 甘孔银 于永澔 刘洪喜 王松雁 |
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| 作者单位： | 哈尔滨工业大学材料学院现代焊接生产技术国家重点实验室,哈尔滨,150001 |
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| 摘 要： | 采用等离子体浸没离子注入沉积(PIIID)技术在GCr15轴承钢表面形成TiN薄膜,并采用划痕法对不同参数条件下膜层的膜基结合力进行了测量.结果发现:适当的氩离子溅射清洗和加入合适的过渡层可以提高膜基结合力,而且膜基结合力也会随着注入电压和注入量与沉积量比例的变化而改变.
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| 关 键 词： | 等离子体浸没离子注入与沉积 结合力 划痕法 |
| 文章编号： | 1672-7126(2004)03-0233-05 |
| 修稿时间： | 2003年10月25 |
Interfacial Adhesion of GCr15 Bearing Steel and TiN Films Grown by Plasma Immersion Ion Implantation and Deposition |
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| Wang Yuhang,Tang Baoyin ,Wang Langping,Wang Xiaofeng,Gan Kongyin,Yu Yonghao,Liu Hongxi and Wang Songyan.Interfacial Adhesion of GCr15 Bearing Steel and TiN Films Grown by Plasma Immersion Ion Implantation and Deposition[J].JOurnal of Vacuum Science and Technology,2004,24(3):233-237. |
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| Authors: | Wang Yuhang Tang Baoyin Wang Langping Wang Xiaofeng Gan Kongyin Yu Yonghao Liu Hongxi and Wang Songyan |
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| Affiliation: | Wang Yuhang,Tang Baoyin *,Wang Langping,Wang Xiaofeng,Gan Kongyin,Yu Yonghao,Liu Hongxi and Wang Songyan |
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| Abstract: | TiN films were grown by plasma immersion ion implantation combined with deposition (PIIID) on GCr15 bearing steel substrates.The interfacial adhesion was studied.We found that surface cleaning of the substrate by argon ion sputtering and proper buffer layer may increase the interfacial adhesion.Film growth conditions,such as bias voltage and the ratio between deposition and implantation may also effect the interfacial adhesion to a varying degree. |
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| Keywords: | Plasma Immersion Ion Implantation and deposition Adhesion Scratch test |
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