| 电磁激励谐振式MEMS压力传感器闭环控制研究 |
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| 引用本文： | 刘猛,王军波,李玉欣,陈德勇. 电磁激励谐振式MEMS压力传感器闭环控制研究[J]. 传感技术学报, 2010, 23(8): 1066-1069. DOI: 10.3969/j.issn.1004-1699.2010.08.004 |
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| 作者姓名： | 刘猛 王军波 李玉欣 陈德勇 |
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| 作者单位： | 中国科学院电子学研究所,传感技术国家重点实验室,北京,100190;中国科学院研究生院,北京,100190;中国科学院电子学研究所,传感技术国家重点实验室,北京,100190 |
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| 基金项目： | 国家自然科学基金项目资助，国家"863"计划项目资助 |
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| 摘 要： | 在谐振器动力学分析的基础上,系统地比较了谐振式压力传感器检测速度谐振频率和检测位移谐振频率的优缺点.设计出一种零相移的电磁激励谐振式MEMS压力传感器闭环控制系统,该系统利用检测速度谐振频率提高传感器的信号检测稳定性,并且控制电路无需移相环节即可保证传感器在工作频率范围内实现稳定可靠的闭环自激.实验结果表明,采用该闭环控制系统的传感器具有较高的稳定性,传感器长时漂移低于0.025%F.S.,在10 hPa～1 050 hPa范围内非线性度为0.06%.
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| 关 键 词： | 谐振式压力传感器 电磁激励 检测速度谐振频率 闭环控制 零相移 |
Research on Closed-loop Control for Resonant MEMS Pressure Sensor with Electromagnetic Excitation |
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| LIU Meng,WANG Junbo,LI Yuxin,CHEN Deyong. Research on Closed-loop Control for Resonant MEMS Pressure Sensor with Electromagnetic Excitation[J]. Journal of Transduction Technology, 2010, 23(8): 1066-1069. DOI: 10.3969/j.issn.1004-1699.2010.08.004 |
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| Authors: | LIU Meng WANG Junbo LI Yuxin CHEN Deyong |
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| Affiliation: | LIU Meng1,2,WANG Junbo1*,LI Yuxin1,CHEN Deyong11.State Key Laboratory of Transducer Technology,Institute of Electronics,Chinese Academy of Sciences,Beijing 100190,China,2.Graduate University of Chinese Academy of Sciences |
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| Abstract: | Based on dynamic analysis of resonator,speed resonant frequency detection for the resonant pressure sensor is compared to displacement resonant frequency detection systematically.A zero-phase shift closed-loop control system for electromagnetic excited resonant MEMS pressure sensor is designed and speed resonant frequency is used,with which the stability of the resonant frequency detection is improved.And without any phase-shift unit,the control circuitry can achieve stable and reliable self-excitation over... |
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| Keywords: | Resonant Pressure Sensor Electromagnetic excitation Speed resonant frequency Closed-loop control Zero-phase shift |
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