MOD制备的PZT薄膜的相结构发展和成分分析

采用MOD工艺制备了PZT薄膜，利用XRD和TEM研究了焦绿石相向钙钛矿相的转变过程．制备在Pt／Ti／SiO₂／Si衬底上的PZT薄膜，其XRD分析显示焦绿石相在600℃完全转变为钙钛矿相；与之相比，Pt箔上无支持的PZT薄膜，其TBM分析表明PZT焦绿石相完全转变为钙钛矿相的温度更高，且与薄膜的厚度有关．XPS研究表明，薄膜表面含有化学吸附氧和污染碳，无其它杂质存在.表面富含少量Pb，其Zr／Ti比与化学计量比一致，但晶格中缺氧．

Phase Structure Development and Composition Analysis of PZT Thin Films Prepared by Metallo-organic Decomposition

PZT thin films were prepared by metallo-organic decomposition(MOD). Phase transformation from pyrochlore to perovskite was studied by XRD and TEM. XRD analysis showed that pyrochlore phase transformes into perovskite phase fully above 600℃for the PZT thin films on Pt/Ti/SiO₂/Si substrates. However, TEM results indicated, for the free-standing PZT thin films on Pt foil with many microholes, that the transforming temperature from pyrochlore to perovskite is much higher, and the temperature is related to the thickness of thin films. The surface states of MOD derived PZT thin films were investigated by X-ray photoelectron spectroscopy(XPS) with whole and narrow scanning measurement. The results showed that there are chemical-absorbed oxygen and contamination of carbon in the film surfaces which came from sample handling or pumping oil. Other impurity could not be detected. The films have a little Pb-rich in the surface and a stoichiometry of Zr/Ti ratio. However, the crystal lattice of the thin film is oxygen-deficiency.