| 复合钒钛酸干凝胶薄膜的湿敏特性研究 |
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| 引用本文： | 李莉,盖翠萍,杨雪凤,邵丽英,王宝辉.复合钒钛酸干凝胶薄膜的湿敏特性研究[J].电子元件与材料,2009,28(11). |
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| 作者姓名： | 李莉 盖翠萍 杨雪凤 邵丽英 王宝辉 |
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| 作者单位： | 大庆石油学院,化学化工学院,黑龙江,大庆,163318 |
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| 基金项目： | 黑龙江省教育厅科学技术研究资助项目 |
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| 摘 要： | 采用sol-gel法制备了复合钒钛酸干凝胶(H2V10Ti2O30-y·nH2O)薄膜,并对其湿敏特性进行了研究。结果表明:该薄膜为层状结构。用此薄膜制备的湿敏元件,在RH为11%～95%的范围内,感湿特性曲线线性好,其响应、恢复时间分别为5s和20s,湿滞为RH2%,感湿温度系数为RH0.45%/℃,并具有良好的稳定性。H2V10Ti2O30-y·nH2O干凝胶薄膜湿敏元件的灵敏度和湿滞均优于复合钒酸(H2V12O31-y·nH2O)干凝胶薄膜湿敏元件。
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| 关 键 词： | sol-gel法 复合钒钛酸干凝胶 薄膜 湿敏特性 |
Humidity sensitive properties of poly-vanadium-titanium acid xerogel thin films |
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| LI Li,GAI Cuiping,YANG Xuefeng,SHAO Liying,WANG Baohui.Humidity sensitive properties of poly-vanadium-titanium acid xerogel thin films[J].Electronic Components & Materials,2009,28(11). |
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| Authors: | LI Li GAI Cuiping YANG Xuefeng SHAO Liying WANG Baohui |
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| Abstract: | Poly-vanadium-titanium acid xerogel(H_2V_(10)Ti_2O_(30-y)·nH_2O)thin films were fabricated by sol-gel method and their humidity sensitive properties were studied. The results show that the thin films have a layered structure. The humidity sensitive property curve of the humidity sensor prepared by this thin films is good linearity in the range of RH 11%～95%. Its response time and recovery time of the humidity sensor are 5 s and 20 s, respectively. The humidity hysteresis is RH 2% and the temperature coefficient of the humidity is RH 0.45% /℃ for the humidity sensor. The humidity sensor appear good long term stability. The sensitivity and humidity hysteresis of the humidity sensor are superior than those of poly-vanadium acid xerogel thin film humidity sensors. |
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| Keywords: | sol-gel method poly-vanadium-titanium acid xerogel thin films humidity sensitive properties |
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