| 自补偿型射频等离子体探针 |
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| 引用本文： | 吴常津 Rees,JA.自补偿型射频等离子体探针[J].真空电子技术,1992(6):8-13. |
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| 作者姓名： | 吴常津 Rees JA |
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| 作者单位： | 机电部12所，英国利物浦大学 100016 |
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| 摘 要： | 自补偿型郎缪尔探针是克服射频场对等离子体诊断产生干扰的有效工具。本文对这种探针的特性进行了分析。
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| 关 键 词： | 补偿 等离子体 射频阻塞元件 探针 |
A Self-compensating Langmuir Probe for RF Plasma Diagnostics |
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| Wu Changjin.A Self-compensating Langmuir Probe for RF Plasma Diagnostics[J].Vacuum Electronics,1992(6):8-13. |
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| Authors: | Wu Changjin |
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| Abstract: | The particular features of the self-compensating Langmuir probe discussed in this paper are designed to overcome those difficulties associated with operating within a plasma generated by rf fields and to prevent residual rf voltages appearing across the plasma sheath which develops around the probe. |
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| Keywords: | self-compensaticn rf plasma rf choke |
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