| Zr—Al16吸气剂在低真空的应用 |
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| 引用本文： | 袁希平. Zr—Al16吸气剂在低真空的应用[J]. 真空电子技术, 1992, 0(4): 14-16,8 |
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| 作者姓名： | 袁希平 |
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| 作者单位： | 机电部12所 北京100016 |
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| 摘 要： | 本文介绍 Zr-Al16吸气剂材料在1～130Pa 的低真空状态下的应用试验。特别是在靠溅射离子泵来维持、监测真空度的静态密封真空器件,当器件内部真空度变坏,以致溅射离子泵无法启动和正常工作的程度,如果采用一个结构简单的 Zr-Al16泵,则能有效而简便地解决问题。
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| 关 键 词： | 吸气剂 Zr－Al 低真空 |
Appliction of an Absorbent Zr-Al under a low Vacuum |
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| Yuan Xiping. Appliction of an Absorbent Zr-Al under a low Vacuum[J]. Vacuum Electronics, 1992, 0(4): 14-16,8 |
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| Authors: | Yuan Xiping |
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| Affiliation: | Beijing Vacuum Electronic Iinstitute 100016 |
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| Abstract: | t A test of an absorbent Zr-Al16 carried out under a vacuum from a few hundreds Pa to a few Pa was presented in this paper.For some static sealed vacuum electronic devices of which the inside vacuum is maintained and monitored by sputtering ion pump,the adoption of a simple Zr-Al16 absorption pump can provide a practical way when the vacuum of the device deteriorates to an extent of being unable to start the ion Pump. |
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| Keywords: | Absorbent Zr-Al absorbent |
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