Piezoelectrically actuated RF MEMS DC contact switches with low voltage operation |
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| Authors: | Hee-Chul Lee Jae-Yeong Park Jong-Uk Bu |
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| Affiliation: | Micro Syst. Group, LG Electron. Inst. of Technol., Seoul, South Korea; |
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| Abstract: | In this paper, fully integrated radio frequency (RF) microelectromechanical system (MEMS) switches with piezoelectric actuation have been proposed, designed, fabricated, and characterized. At a very low operation voltage of 2.5V, reliable and reproducible operation of the fabricated switch was obtained. The proposed RF MEMS switch is comprised of a piezoelectric cantilever actuator with a floated contact electrode and isolated CPW transmission line suspended above the silicon substrate. The measured insertion loss and isolation of the fabricated piezoelectric switch are -0.22 dB and -42dB at a frequency of 2GHz, respectively. |
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