| 飞秒激光微加工的研究进展 |
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| 引用本文： | 顾理,孙会来,于楷,赵方方.飞秒激光微加工的研究进展[J].激光与红外,2013,43(1):14-18. |
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| 作者姓名： | 顾理 孙会来 于楷 赵方方 |
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| 作者单位： | 1. 天津市现代机电装备重点实验室天津工业大学机械工程学院,天津300387;四川省制造与自动化重点实验室西华大学,四川成都610039
2. 辽宁省铁岭港华燃气有限公司技术设备部,辽宁铁岭,112000 |
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| 基金项目： | 四川省制造与自动化重点实验室开放基金（No.szjj2011-042）资助 |
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| 摘 要： | 综述了近年来国内外利用飞秒激光微加工的研究进展。飞秒激光脉冲作为材料微纳加工的一项工具,已经从实验室进入到工业化阶段。介绍了飞秒激光在微纳加工领域的一些研究情况,分别就飞秒激光烧蚀微加工以及双光子聚合加工进行了阐述。最后分析了飞秒激光微加工目前存在的问题及未来发展的主要方向。
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| 关 键 词： | 飞秒激光 微加工 烧蚀 双光子聚合 |
Research progress of micro-nanofabrication by femtosecond laser |
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| GU Li,SUN Hui-lai,YU Kai,ZHAO Fang-fang.Research progress of micro-nanofabrication by femtosecond laser[J].Laser & Infrared,2013,43(1):14-18. |
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| Authors: | GU Li SUN Hui-lai YU Kai ZHAO Fang-fang |
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| Affiliation: | School of Mechanical Engineering,Tianjin Polytechnic University,Tianjin 300387,China;Key Laboratory of Manufacturing and its Automation,Xihua University,Chengdu 610039,China;Technical Equipment Department Hong Kong and China Gas Co.,Ltd.(Towngas),Tieling 112000,China |
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| Abstract: | The article reviews the progress of micro-fabrication by femtosecond laser at home and abroad in recent years.Femtosecond laser pulses have undergone through the laboratory process to become a useful tool for material micro-nano-processing in industrial field.In this paper,we introduce the process of femto-second laser precise micro-nanofabrication.Two different fabrication mechanisms are described which are laser ablation and two photo polymerization.Finally,the existing problems and future development of micro-manufacture by femtosecond laser are discussed. |
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| Keywords: | femtosecond laser micro-manufacture ablation two-photo polymerization |
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