| MEMS毫米波滤波器的设计与制作 |
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| 引用本文： | 李倩,杨志,胡小东.MEMS毫米波滤波器的设计与制作[J].微纳电子技术,2010,47(3). |
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| 作者姓名： | 李倩 杨志 胡小东 |
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| 作者单位： | 中国电子科技集团公司,第十三研究所,石家庄,050051 |
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| 摘 要： | 开展了一种基于MEMS工艺的毫米波带通滤波器结构设计和工艺实现,该滤波器结构采用高阻硅作为衬底材料的薄膜支撑结构,选用平行耦合滤波器形式,使用HFSS分析软件对该结构进行了模拟仿真。设计了中心频率为35.0GHz、带内损耗为2.2dB、30dB抑制带宽为2.2GHz的MEMS毫米波滤波器。给出了一套能降低毫米波损耗的MEMS毫米波带通滤波器工艺流程方案,并针对该工艺流程方案进行了关键参数的工艺误差仿真,实现了MEMS毫米波滤波器的工艺制作和测试。测试结果表明,获得的毫米波滤波器的测试结果与仿真结果比较接近。
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| 关 键 词： | 微电子机械系统 毫米波 滤波器 微机械加工 微屏蔽线 |
Design and Fabrication of MEMS Millimeter-Wave Filters |
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| Li Qian,Yang Zhi,Hu Xiaodong.Design and Fabrication of MEMS Millimeter-Wave Filters[J].Micronanoelectronic Technology,2010,47(3). |
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| Authors: | Li Qian Yang Zhi Hu Xiaodong |
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| Affiliation: | The 13th Research Institute;CETC;Shijiazhuang 050051;China |
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| Abstract: | A millimeter-wave band-pass filter was designed and fabricated based on MEMS process.A high-resistance-silicon was used as the thin film support structure of substrates inside the filter.A parallel-coupled bandpass filter was selected,and the structure was simulated by HFSS software.A MEMS millimeter-wave filter was designed with a center frequency of 35 GHz,an in-band loss of 2.2 dB,and a 30 dB rejection bandwidth of 2.2 GHz.A process scheme of the MEMS millimeter-wave band-pass filter was presented to red... |
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| Keywords: | micro-electro-mechanical-system(MEMS) millimeter-wave filter micromachi-ning shielded membrane microstrip |
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