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| 石英晶体谐振式绝对压力传感器研制 | |
| 引用本文： | 潘安宝,闻化,姚东媛,高成臣,谢树海. 石英晶体谐振式绝对压力传感器研制[J]. 传感器与微系统, 2008, 27(1): 85-86,89 |
| 作者姓名： | 潘安宝 闻化 姚东媛 高成臣 谢树海 |
| 作者单位： | 1. 空军军械通用装备军事代表局,北京,100071 2. 空军驻黑龙江地区军事代表室,黑龙江,哈尔滨,150001 3. 中国电子科技集团公司,第四十九研究所,黑龙江,哈尔滨,150001 |
| 摘 要： | 介绍了一体化石英谐振式压力传感器的研制,采用石英晶体材料制做弹性膜片,用音叉式石英力敏谐振器检测压力,减少了传感器的体积,降低了制造工艺难度。研制的传感器量程为0~120 kPa,中心频率为(40±4)kHz,精度为0.05%。 |
| 关 键 词： | 石英晶体 谐振 压力传感器 |
| 文章编号： | 1000-9787（2008）12-0085-02 |
| 收稿时间： | 2007-05-10 |
| 修稿时间： | 2007-05-10 |
Development of quartz-resonance absolute pressure sensor |
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| PAN An-bao,WEN Hua,YAO Dong-yuan,GAO Cheng-chen,XIE Shu-hai. Development of quartz-resonance absolute pressure sensor[J]. Transducer and Microsystem Technology, 2008, 27(1): 85-86,89 | |
| Authors: | PAN An-bao WEN Hua YAO Dong-yuan GAO Cheng-chen XIE Shu-hai |
| Abstract: | The development of an integrative quartz-resonance pressure sensor is explained.Quartz-crystal material is applied to process the elastic film,and the tuning fork quartz-crystal force-sensing resonator is used to detect the pressure.The volume of the sensor is reduced,and the manufacture complexity is decreased.The measuring range of the sensor is 0~120 kPa,the centre frequency is(40±4)kHz,the accuracy is 0.05 %. |
| Keywords: | quartz resonator pressure sensor |
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