| 微结构器件宏模型的建模方法 |
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| 引用本文： | 章绍东,林谢昭. 微结构器件宏模型的建模方法[J]. 机电工程, 2007, 24(1): 71-73 |
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| 作者姓名： | 章绍东 林谢昭 |
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| 作者单位： | 温州职业技术学院,电气工程系,浙江,温州,325035;浙江大学,机械与能源工程学院,浙江,杭州,310027 |
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| 摘 要： | 主要描述了微机械器件宏模型的构建问题.以微悬臂梁为例子,阐述了等效电路法、节点分析法、S-空间矩匹配方法、模态-Galerkin方法构建微机械宏模型的研究概况以及各个宏建模方法的优、缺点.
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| 关 键 词： | 宏模型 等效电路 节点分析法 矩匹配 Galerkin方法 |
| 文章编号： | 1001-4551(2007)1-0071-03 |
| 修稿时间： | 2006-07-28 |
Compact modelling methods for micro-structure device |
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| ZHANG Shao-dong,LIN Xie-zhao. Compact modelling methods for micro-structure device[J]. Mechanical & Electrical Engineering Magazine, 2007, 24(1): 71-73 |
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| Authors: | ZHANG Shao-dong LIN Xie-zhao |
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| Affiliation: | 1. Department of Electrical Engineering, Wenzhou Vocational and Technical College, Wenzhou 325035, China ; 2. College of Mechanical and Energy Engineering, Zhejiang University, Hangzhou 310027, China |
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| Abstract: | The cantilever microbeam was chosen as an example of illuminating how to extract the compact model.These macro-modelling methods include equivalent circuit representation,nodal design(NODAS),moment-matching procedure in the s-space and mode-Galerkin's procedure.The major contributions and the advantages and disadvantages of each approach were summarized and discussed. |
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| Keywords: | macro-model equivalent circuit representation nodal design moment-matching procedure mode-Galerkin's procedure |
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