| 三步酸蚀去钴对金刚石薄膜附着力影响的研究 |
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| 引用本文： | 邢文娟,汪建华,王传新,皮华滨,陈宁.三步酸蚀去钴对金刚石薄膜附着力影响的研究[J].硬质合金,2008,25(2). |
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| 作者姓名： | 邢文娟 汪建华 王传新 皮华滨 陈宁 |
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| 作者单位： | 武汉工程大学等离子体化学与新材料重点实验室,湖北武汉,430073 |
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| 基金项目： | 湖北省科技攻关项目
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湖北省教育厅创新团队支持项目 |
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| 摘 要： | 用热丝化学气相沉积(HFCVD)制备金刚石薄膜涂层之前,采用两步酸腐蚀和三步酸腐蚀对WC-Co硬质合金(YG6)基体表面进行去Co预处理。SEM形貌观察、X射线衍射谱和EDAX能谱分析都表明,与两步腐蚀方法相比,三步酸腐蚀处理表面去Co效果更加好,沉积金刚石薄膜的压痕图更证实其对涂层质量的改善,并且该方法可以减少预处理时间,更适宜于工业生产。
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| 关 键 词： | 硬质合金 金刚石薄膜 三步酸蚀法 两步酸蚀法 附着力 |
Study on Effect of Three-Step Acid Etching Co Pretreatment on Adhesion of Diamond Film on Cemented Carbide |
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| Xing Wenjuan,Wang Jianhua,Wang Chuanxin,Pi Huabin,Chen Ning.Study on Effect of Three-Step Acid Etching Co Pretreatment on Adhesion of Diamond Film on Cemented Carbide[J].Cemented Carbide,2008,25(2). |
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| Authors: | Xing Wenjuan Wang Jianhua Wang Chuanxin Pi Huabin Chen Ning |
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| Abstract: | Acid etching Co pretreatment of WC-6%Co cemented carbide by two-step method and three-step method was studied respectively before coating preparation by hot-filament chemical vapor deposition(HFCVD).The results of detection by scanning electron spectroscopy,X-ray diffraction and EDAX energy spectrum show that the three-step method has better effect in etching Co pretreatment than two-step method.The indentation images of diamond films show that the coating quality is improved by the three-step method.Moreover,the three-step method reduces the time needed for pretreatment and is more suitable for industrial production. |
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| Keywords: | cemented carbide diamond film three-step acid etching two-step acid etching adhesion |
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