TiVCN复合膜的微结构、力学性能与摩擦磨损性能研究

采用多靶磁控溅射技水,分别利用不同V靶功率和石墨靶功率制备一系列不同V含量和C含量的TiVN和TiVCN复合膜.利用X射线衍射仪、纳米压痕仪、高温摩擦磨损仪研究了TiVN和TiVCN复合膜的微结构、力学性能及室温和高温摩擦磨损性能.研究表明,当V靶功率为60 W时,TiVN薄膜的硬度达到最大值,为25.02 GPa.在此基础上逐渐加入C元素,当石墨靶功率为20 W时,TiVCN薄膜的硬度达到最大值,为28.51 GPa.当石墨靶功率进一步增加,薄膜的硬度值开始逐渐降低.室温下,随着石墨靶功率的增加,TiVCN薄膜的摩擦系数逐渐减小.高温下,TiVCN复合膜的摩擦系数随着温度的升高先增加后减小,在700℃时获得最小值,当温度继续升高摩擦系数又增加.讨论了高温下TiVCN复合膜Magneli相的作用和自适应机制.

MICROSTRUCTURES,MECHANNICAL PROPERTIES AND FRICTION PROPERTIES OF TiVCN COMPOSITE FILMS

A series of TiVN and TiVCN nano-composite films with different V and C contents were synthesized using a multi-target magnetron sputtering technique.The microstructures, mechanical properties and friction properties at different test temperatures were investigated by X-ray diffraction,nano-indentation,CSM high-temperature ball-on-disc tribo-meter and SEM-EDS analysis. The results showed that the hardness values of the TiVN and TiVCN films reached maximum of 25.02 GPa and 28.51 GPa at a V target power of 60 W and C target power of 20 W,respectively.With the further increase of C,however,the hardness of TiVCN films decreased gradually.At room temperature, the friction coefficient of the TiVCN film decreased with the increase power of C target.At high temperature,the friction coefficient of the TiVCN showed a up-down-up curve with the increase of test temperature.The effects and adaptive mechanisms of Magneli phase formed in the TiVCN films at high temperature were discussed.