High-energy x-ray microbeam with total-reflection mirror optics

Total-reflection mirror optics for high-energy x-ray microfocusing have been developed, and tested in the energy range of 30-100 keV at beamline 20XU of Synchrotron Radiation Facility SPring-8. The optical system consists of a Kirkpatrick-Baez-type J. Opt. Soc. Am. 38, 766 (1548)] focusing optics with aspherical total-reflection mirrors for the purpose of reducing the spherical aberrations. A focused beam size of 0.35 x 0.4 microm(2) has been achieved at an x-ray energy of 80 keV, and the measured spot size was less than 1 microm in the x-ray energy region below 90 keV.